How to optimize the selection of dry screw vacuum pump
Different types of dry vacuum pump, we are constantly looking forward to reducing its physical size. However, this is in contradiction with the pumping speed of the vacuum pump, which is proportional to the volume of the vacuum pump. Small physical size means low volume. Of course, another important factor affecting the pumping speed of vacuum pump is speed. In order to make the suction speed of small vacuum pump different from that of large vacuum pump, it is necessary to improve the speed. There are two ways to change the speed of vacuum pump, one is to change the frequency of power supply, even with frequency converter; the other is to change the proportion of gearbox. Among them, the advantage of using frequency converter is that it can provide a closed-loop control, but it is easy to cause torque loss under heavy load. Changing the gear ratio of the gearbox is a very economical way, of course, it can only provide a single speed, can not be controlled.
Today, you can see that there are so many different designs for dry vacuum pumps, each with its own characteristics and advantages and disadvantages. In history, the use of capital has been an important factor influencing people's choice of vacuum pump. More and more vacuum pump users realize that the stability of vacuum pump should also be considered. Due to the wrong solution of the vacuum pump, the efficiency of the machine is reduced, which affects the consumption and delivery of the wafer, resulting in the formation of wafer scrap and processing damage of other parts. As the screw design adopts a single-stage design, the number of parts used can be reduced by up to 60% compared with multi-stage pumps (such as ball gap, claw and combination). This is a big advantage for stability and future maintenance costs.
In general, if the user thinks the power consumption is the most important for him, then choosing an internal compression screw may be a good choice, and the nitrogen content is the least important for him. However, in general, the requirements for tail gas disposal are more and more severe, so it is particularly important to reduce the amount of nitrogen used in the future. If you want to dispose of a variety of semiconductor processes without changing them with a simple inventory control pump, external compression screws are the best choice.
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